Inventor
WANG FEIHU
US11 patents
⚠️ This page may combine multiple inventors who share the name “WANG FEIHU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS12022650B2Jun 25, 2024
Low resistivity DRAM buried word line stack
APPLIED MATERIALS INC2 citations72
US11587936B2Feb 21, 2023
Low resistivity DRAM buried word line stack
APPLIED MATERIALS INC2 citations72
US12453086B2Oct 21, 2025
Low resistivity metal contact stack
APPLIED MATERIALS INC0 citations62
US12104243B2Oct 1, 2024
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations60
US12094773B2Sep 17, 2024
Methods for low resistivity and stress tungsten gap fill
APPLIED MATERIALS INC0 citations57
US11798845B2Oct 24, 2023
Methods and apparatus for low resistivity and stress tungsten gap fill
APPLIED MATERIALS INC0 citations57
US12191198B2Jan 7, 2025
Low resistivity tungsten film and method of manufacture
APPLIED MATERIALS INC0 citations48