Inventor
THAER ANDREAS
DE4 patents
Patents
4 patentsUS4353618AOct 12, 1982
Optical arrangement for the reflecting microscopic examination of an object
LEITZ ERNST GMBH43 citations86
US4612267ASep 16, 1986
Process for producing structures in resist layers using ultrasonic irradiation
LEITZ ERNST GMBH11 citations72
US4672012AJun 9, 1987
Process for modifying structural profiles in resist layers
LEITZ ERNST GMBH5 citations61
US4363536ADec 14, 1982
Instrument base for optical devices
LEITZ ERNST GMBH6 citations56