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Inventor
SCHOEN DETLEF G
DE
2 patents
Patents
2 patents
US4786887A
Nov 22, 1988
Thin-film strain gauge system and method of manufacturing same
PHILIPS CORP
51 citations
90
US4673588A
Jun 16, 1987
Device for coating a substrate by means of plasma-CVD or cathode sputtering
PHILIPS CORP
20 citations
77