Inventor

ARAHATA TAKASHI

JP2 patents

Patents

2 patents

US7927187B2Apr 19, 2011

Method of polishing a target surface

NIPPON MICRO COATING KK7 citations81

US7241204B2Jul 10, 2007

Polishing pad, method of producing same and method of polishing

NIPPON MICRO COATING KK5 citations60