Inventor
AKAZAWA MORIAKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “AKAZAWA MORIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
12 patentsUS5306671AApr 26, 1994
Method of treating semiconductor substrate surface and method of manufacturing semiconductor device including such treating method
MITSUBISHI ELECTRIC CORP89 citations96
US6586329B1Jul 1, 2003
Semiconductor device and a method of manufacturing thereof
MITSUBISHI ELECTRIC CORP20 citations92
US6097052AAug 1, 2000
Semiconductor device and a method of manufacturing thereof
MITSUBISHI ELECTRIC CORP19 citations92
US5474615ADec 12, 1995
Method for cleaning semiconductor devices
MITSUBISHI ELECTRIC CORP25 citations92
US5302541AApr 12, 1994
Manufacturing method of a semiconductor device with a trench capacitor
MITSUBISHI ELECTRIC CORP30 citations92
US4915979AApr 10, 1990
Semiconductor wafer treating device utilizing ECR plasma
MITSUBISHI ELECTRIC CORP24 citations92
US5223085AJun 29, 1993
Plasma etching method with enhanced anisotropic property and apparatus thereof
MITSUBISHI ELECTRIC CORP19 citations82
US4982138AJan 1, 1991
Semiconductor wafer treating device utilizing a plasma
MITSUBISHI ELECTRIC CORP19 citations81
US5038013AAug 6, 1991
Plasma processing apparatus including an electromagnet with a bird cage core
MITSUBISHI ELECTRIC CORP8 citations74
US5218218AJun 8, 1993
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP9 citations73
US5203981AApr 20, 1993
Vacuum-treatment apparatus
MITSUBISHI ELECTRIC CORP14 citations73
US6603163B2Aug 5, 2003
Semiconductor device with capacitor and method of manufacturing thereof
MITSUBISHI ELECTRIC CORP4 citations59