Inventor

VETTER EGBERT

DE2 patents

Patents

2 patents

US5614742AMar 25, 1997

Micromechanical accelerometer with plate-like semiconductor wafers

LITEF GMBH47 citations94

US5504032AApr 2, 1996

Micromechanical accelerometer and method of manufacture thereof

LITEF GMBH26 citations90