Inventor
WIEMER MAIK
DE6 patents
⚠️ This page may combine multiple inventors who share the name “WIEMER MAIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LITEF GMBH
3 patentsUS5614742AMar 25, 1997
Micromechanical accelerometer with plate-like semiconductor wafers
LITEF GMBH47 citations94
US5504032AApr 2, 1996
Micromechanical accelerometer and method of manufacture thereof
LITEF GMBH26 citations90
US6863832B1Mar 8, 2005
Method for producing a torsion spring
LITEF GMBH29 citations87