Inventor

KOPALIDIS PETER M

US5 patents

⚠️ This page may combine multiple inventors who share the name “KOPALIDIS PETER M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

2 patents

US6221169B1Apr 24, 2001

System and method for cleaning contaminated surfaces in an ion implanter

AXCELIS TECH INC64 citations94

US6259105B1Jul 10, 2001

System and method for cleaning silicon-coated surfaces in an ion implanter

AXCELIS TECH INC29 citations85

KOPALIDIS PETER M

2 patents

US8653807B2Feb 18, 2014

Apparatus and method for measuring ion beam current

KOPALIDIS PETER M4 citations68

US8890506B2Nov 18, 2014

Apparatus and method for measuring ion beam current

KOPALIDIS PETER M0 citations47

ADVANCED ION BEAM TECH INC

1 patent

US9852887B2Dec 26, 2017

Ion source of an ion implanter

ADVANCED ION BEAM TECH INC6 citations71