Inventor

LIN YU-SANG

US2 patents

Patents

2 patents

US6788074B2Sep 7, 2004

System and method for using a capacitance measurement to monitor the manufacture of a semiconductor

TEXAS INSTRUMENTS INC20 citations87

US6856143B2Feb 15, 2005

System and method for measuring a capacitance of a conductor

TEXAS INSTRUMENTS INC4 citations57