Inventor
SHIRAI HISATSUGU
JP4 patents
Patents
4 patentsUS5175128ADec 29, 1992
Process for fabricating an integrated circuit by a repetition of exposure of a semiconductor pattern
FUJITSU LTD13 citations72
US5132252AJul 21, 1992
Method for fabricating semiconductor devices that prevents pattern contamination
FUJITSU LTD17 citations72
US7226866B2Jun 5, 2007
Etching method for making a reticle
FUJITSU LTD1 citations48
US7270920B2Sep 18, 2007
Fabrication method of a semiconductor device
FUJITSU LTD0 citations47