Inventor

SCHELLEKENS ADRIANUS JOHANNES HENDRIKUS

NL5 patents

⚠️ This page may combine multiple inventors who share the name “SCHELLEKENS ADRIANUS JOHANNES HENDRIKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

4 patents

US8994944B2Mar 31, 2015

Methods and scatterometers, lithographic systems, and lithographic processing cells

ASML NETHERLANDS BV24 citations92

US10585363B2Mar 10, 2020

Alignment system

ASML NETHERLANDS BV4 citations70

US12517441B2Jan 6, 2026

Cleaning method and associated illumination source metrology apparatus

ASML NETHERLANDS BV0 citations56

US11243470B2Feb 8, 2022

Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method

ASML NETHERLANDS BV0 citations49

CRAMER HUGO AUGUSTINUS JOSEPH

1 patent

US9081303B2Jul 14, 2015

Methods and scatterometers, lithographic systems, and lithographic processing cells

CRAMER HUGO AUGUSTINUS JOSEPH73 citations96