Inventor
Xu Qianbin
CN4 patents
Patents
4 patentsUS10714493B2Jul 14, 2020
Semiconductor plug protected by protective dielectric layer in three-dimensional memory device and method for forming the same
YANGTZE MEMORY TECH CO LTD3 citations71
US10892280B2Jan 12, 2021
Inter-deck plug in three-dimensional memory device and method for forming the same
YANGTZE MEMORY TECH CO LTD3 citations70
US10741578B2Aug 11, 2020
Inter-deck plug in three-dimensional memory device and method for forming the same
YANGTZE MEMORY TECH CO LTD3 citations70
US10679985B2Jun 9, 2020
Three-dimensional memory device having semiconductor plug formed using backside substrate thinning
YANGTZE MEMORY TECH CO LTD1 citations61