Inventor

HENNES ERIC

NL2 patents

Patents

2 patents

US10710870B2Jul 14, 2020

MEMS sensor structure comprising mechanically preloaded suspension springs

STICHTING VU VUMC2 citations62

US11267694B2Mar 8, 2022

MEMS sensor structure comprising mechanically preloaded suspension springs

STICHTING VU VUMC0 citations52