Inventor
GOH CLINTON
SG4 patents
Patents
4 patentsUS10991617B2Apr 27, 2021
Methods and apparatus for cleaving of semiconductor substrates
APPLIED MATERIALS INC2 citations69
US11610807B2Mar 21, 2023
Methods and apparatus for cleaving of semiconductor substrates
APPLIED MATERIALS INC0 citations59
US11569122B2Jan 31, 2023
Methods and apparatus for cleaving of semiconductor substrates
APPLIED MATERIALS INC0 citations59
US11289357B2Mar 29, 2022
Methods and apparatus for high voltage electrostatic chuck protection
APPLIED MATERIALS INC0 citations59