Inventor
Gillespie Walter Dale
US8 patents
⚠️ This page may combine multiple inventors who share the name “Gillespie Walter Dale”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
Cymer LLC
7 patentsUS12374853B2Jul 29, 2025
Control system for a plurality of deep ultraviolet optical oscillators
Cymer LLC0 citations59
US12597753B2Apr 7, 2026
Packed-bed filter for metal fluoride dust trapping in laser discharge chambers
Cymer LLC0 citations57
US12586978B2Mar 24, 2026
Apparatus for and method of generating multiple laser beams
Cymer LLC0 citations57
US11614012B2Mar 28, 2023
Nonwoven screens for dust trapping in laser discharge chambers
Cymer LLC0 citations57
US11777271B2Oct 3, 2023
Method of and apparatus for extending electrode life in a laser chamber
Cymer LLC1 citations54
US11949203B2Apr 2, 2024
Gas management system
Cymer LLC0 citations40
US11949202B2Apr 2, 2024
Gas management system
Cymer LLC0 citations40