Inventor
LEE UIHYOUNG
KR7 patents
⚠️ This page may combine multiple inventors who share the name “LEE UIHYOUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS11871563B2Jan 9, 2024
Method of forming contact included in semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations69
US12247290B2Mar 11, 2025
Flow control method using plasma system
SAMSUNG ELECTRONICS CO LTD0 citations59
US12238923B2Feb 25, 2025
Method of forming contact included in semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations58
US9812331B2Nov 7, 2017
Apparatus for and method of processing substrate
SAMSUNG ELECTRONICS CO LTD1 citations51
US12390763B2Aug 19, 2025
Apparatus trapping an exhaust material from a substrate-processing process and apparatus for processing a substrate including the trapping apparatus
SAMSUNG ELECTRONICS CO LTD0 citations47
US12211745B2Jan 28, 2025
Methods of fabricating semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations45