Inventor
SHENG STEVE
US3 patents
Patents
3 patentsUS4846440AJul 11, 1989
Valve with metal diaphragm and flat surface valve body
SPECTRA PHYSICS34 citations88
US5025952AJun 25, 1991
Gas resupply valve with microscopic aperture and with sealing member supported by valve body
SPECTRA PHYSICS10 citations69
US4815100AMar 21, 1989
Gas resupply valve with microscopic aperture for gas lasers
SPECTRA PHYSICS4 citations58