Inventor
TAKASHIMA TSUNEO
JP9 patents
Patents
9 patentsUS6266133B1Jul 24, 2001
Stage device, an exposure apparatus and a device manufacturing method using the same
CANON KK84 citations97
US5596366AJan 21, 1997
Camera apparatus having camera movement detection
CANON KK98 citations97
US6583859B2Jun 24, 2003
Stage device, an exposure apparatus and a device manufacturing method using the same
CANON KK35 citations92
US6151100ANov 21, 2000
Positioning system
CANON KK30 citations92
US5825545AOct 20, 1998
Image stabilizing device
CANON KK19 citations92
US7084538B2Aug 1, 2006
Bearing assembly, stage device using same, and exposure apparatus using same
CANON KK12 citations82
US7262524B2Aug 28, 2007
Bearing assembly, stage device using same, and exposure apparatus using same
CANON KK2 citations61
US6965426B2Nov 15, 2005
Positioning system and exposure apparatus having the same
CANON KK6 citations61
US5483376AJan 9, 1996
Optical apparatus
CANON KK2 citations61