Inventor
POOLLA KAMESHWAR
US6 patents
⚠️ This page may combine multiple inventors who share the name “POOLLA KAMESHWAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ONWAFER TECHNOLOGIES INC
5 patentsUS6738722B2May 18, 2004
Data collection and correction methods and apparatus
ONWAFER TECHNOLOGIES INC54 citations94
US7016754B2Mar 21, 2006
Methods of and apparatus for controlling process profiles
ONWAFER TECHNOLOGIES INC44 citations91
US6907364B2Jun 14, 2005
Methods and apparatus for deriving thermal flux data for processing a workpiece
ONWAFER TECHNOLOGIES INC41 citations91
US7299148B2Nov 20, 2007
Methods and apparatus for low distortion parameter measurements
ONWAFER TECHNOLOGIES INC20 citations90
US7212950B2May 1, 2007
Methods and apparatus for equipment matching and characterization
ONWAFER TECHNOLOGIES INC13 citations82