Inventor
WEILAND LARG H
US13 patents
Patents
13 patentsUS6901564B2May 31, 2005
System and method for product yield prediction
PDF SOLUTIONS INC143 citations98
US6834375B1Dec 21, 2004
System and method for product yield prediction using a logic characterization vehicle
PDF SOLUTIONS INC246 citations98
US6449749B1Sep 10, 2002
System and method for product yield prediction
PDF SOLUTIONS INC202 citations98
US7174521B2Feb 6, 2007
System and method for product yield prediction
PDF SOLUTIONS INC32 citations96
US7673262B2Mar 2, 2010
System and method for product yield prediction
PDF SOLUTIONS INC11 citations92
US7373625B2May 13, 2008
System and method for product yield prediction
PDF SOLUTIONS INC12 citations92
US7356800B2Apr 8, 2008
System and method for product yield prediction
PDF SOLUTIONS INC15 citations92
US6475871B1Nov 5, 2002
Passive multiplexor test structure for integrated circuit manufacturing
PDF SOLUTIONS INC32 citations92
US7434197B1Oct 7, 2008
Method for improving mask layout and fabrication
PDF SOLUTIONS INC21 citations90
US6787800B2Sep 7, 2004
Test vehicle with zig-zag structures
PDF SOLUTIONS INC18 citations84
US7197726B2Mar 27, 2007
Test structures for estimating dishing and erosion effects in copper damascene technology
PDF SOLUTIONS INC11 citations82
US7024642B2Apr 4, 2006
Extraction method of defect density and size distributions
PDF SOLUTIONS INC16 citations82
US7154115B2Dec 26, 2006
Zoom in pin nest structure, test vehicle having the structure, and method of fabricating the structure
PDF SOLUTIONS INC4 citations62