Inventor

GRAU DOMINIK

DE2 patents

⚠️ This page may combine multiple inventors who share the name “GRAU DOMINIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

1 patent

US10698318B2Jun 30, 2020

Method and device for characterizing a mask for microlithography

ZEISS CARL SMT GMBH1 citations59

LEICA MICROSYSTEMS

1 patent

US6845174B2Jan 18, 2005

Arrangement and method for the identification of substrates

LEICA MICROSYSTEMS4 citations57