Inventor
OMATA TOSHIO
JP4 patents
Patents
4 patentsUS6893204B1May 17, 2005
Substrate delivering robot
YASKAWA DENKI SEISAKUSHO KK70 citations95
US7733650B2Jun 8, 2010
Motor controller
YASKAWA DENKI SEISAKUSHO KK14 citations80
US5248923ASep 28, 1993
Manipulator using plane pulse motor
YASKAWA DENKI SEISAKUSHO KK17 citations69
US7129606B2Oct 31, 2006
Vacuuming motor and vacuuming apparatus
YASKAWA DENKI SEISAKUSHO KK0 citations36