Inventor

TAIRA MASAKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “TAIRA MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7608163B2Oct 27, 2009

Substrate processing apparatus and method

TOKYO ELECTRON LTD2 citations54

US7347214B2Mar 25, 2008

Rotary shaft sealing mechanism and liquid processing apparatus

TOKYO ELECTRON LTD1 citations49

SHIBAURA ELECTRONICS CO LTD

1 patent

US11092496B2Aug 17, 2021

Temperature sensor and manufacturing method of temperature sensor

SHIBAURA ELECTRONICS CO LTD0 citations56

TAIRA MASAKI

1 patent

US9117854B2Aug 25, 2015

Substrate processing apparatus, substrate processing method, and storage medium storing a computer program for performing substrate processing method

TAIRA MASAKI0 citations26