Inventor
MULLAPUDI RAVI
US13 patents
⚠️ This page may combine multiple inventors who share the name “MULLAPUDI RAVI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TANGO SYSTEMS INC
10 patentsUS7479210B2Jan 20, 2009
Temperature control of pallet in sputtering system
TANGO SYSTEMS INC12 citations80
US9932668B2Apr 3, 2018
Physical vapor deposition system using backside gas cooling of workpieces
TANGO SYSTEMS INC2 citations62
US7799190B2Sep 21, 2010
Target backing plate for sputtering system
TANGO SYSTEMS INC4 citations60
US7794574B2Sep 14, 2010
Top shield for sputtering system
TANGO SYSTEMS INC2 citations60
US7682495B2Mar 23, 2010
Oscillating magnet in sputtering system
TANGO SYSTEMS INC3 citations60
US7744730B2Jun 29, 2010
Rotating pallet in sputtering system
TANGO SYSTEMS INC2 citations58
US10550464B2Feb 4, 2020
Physical vapor deposition method using backside gas cooling of workpieces
TANGO SYSTEMS INC0 citations43
US7785455B2Aug 31, 2010
Cross-contaminant shield in sputtering system
TANGO SYSTEMS INC0 citations40
US9957606B2May 1, 2018
Physical vapor deposition system using rotating pallet with X and Y positioning
TANGO SYSTEMS INC0 citations34
US10053771B2Aug 21, 2018
Physical vapor deposition system with target magnets controlled to only be above workpiece
TANGO SYSTEMS INC0 citations30