Inventor
MADAR TOM
US3 patents
Patents
3 patentsUS6589352B1Jul 8, 2003
Self aligning non contact shadow ring process kit
APPLIED MATERIALS INC566 citations98
US6375748B1Apr 23, 2002
Method and apparatus for preventing edge deposition
APPLIED MATERIALS INC293 citations96
US8342119B2Jan 1, 2013
Self aligning non contact shadow ring process kit
APPLIED MATERIALS INC11 citations83