Inventor
KIEHLBAUCH MARK W
US10 patents
⚠️ This page may combine multiple inventors who share the name “KIEHLBAUCH MARK W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIEHLBAUCH MARK W
5 patentsUS8252194B2Aug 28, 2012
Methods of removing silicon oxide
KIEHLBAUCH MARK W156 citations97
US8274777B2Sep 25, 2012
High aspect ratio openings
KIEHLBAUCH MARK W51 citations96
US9005473B2Apr 14, 2015
Gaseous compositions comprising hydrogen fluoride and an alkylated ammonia derivative
KIEHLBAUCH MARK W2 citations61
US8318035B2Nov 27, 2012
Methods of finishing quartz glass surfaces and components made by the methods
KIEHLBAUCH MARK W3 citations61
US8760841B2Jun 24, 2014
High aspect ratio openings
KIEHLBAUCH MARK W0 citations50
MICRON TECHNOLOGY INC
3 patentsUS10446578B1Oct 15, 2019
Methods used in forming an array of elevationally-extending strings of memory cells, methods of forming an array of elevationally-extending strings of memory cells, and methods of forming an array of vertical strings of memory cells
MICRON TECHNOLOGY INC36 citations94
US10553607B1Feb 4, 2020
Method of forming an array of elevationally-extending strings of programmable memory cells and method of forming an array of elevationally-extending strings of memory cells
MICRON TECHNOLOGY INC13 citations85
US9595387B2Mar 14, 2017
High aspect ratio openings
MICRON TECHNOLOGY INC3 citations72