Inventor
WILK GLEN
US10 patents
⚠️ This page may combine multiple inventors who share the name “WILK GLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
6 patentsUS7795160B2Sep 14, 2010
ALD of metal silicate films
ASM INC412 citations98
US7608549B2Oct 27, 2009
Method of forming non-conformal layers
ASM INC40 citations91
US7202166B2Apr 10, 2007
Surface preparation prior to deposition on germanium
ASM INC20 citations91
US7972977B2Jul 5, 2011
ALD of metal silicate films
ASM INC7 citations83
US7666474B2Feb 23, 2010
Plasma-enhanced pulsed deposition of metal carbide films
ASM INC17 citations83
US7799680B2Sep 21, 2010
Surface preparation prior to deposition on germanium
ASM INC3 citations61