Inventor

EPPES JAMES M

US4 patents

⚠️ This page may combine multiple inventors who share the name “EPPES JAMES M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

COLLINS JIMMY D

3 patents

US8544483B2Oct 1, 2013

Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids

COLLINS JIMMY D4 citations70

US8899248B2Dec 2, 2014

Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids

COLLINS JIMMY D3 citations59

US8656936B2Feb 25, 2014

Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids

COLLINS JIMMY D3 citations59

FSI INT INC

1 patent

US7681581B2Mar 23, 2010

Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids

FSI INT INC14 citations85