Inventor
FROSIEN JüRGEN
DE21 patents
⚠️ This page may combine multiple inventors who share the name “FROSIEN JüRGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH
6 patentsUS9666405B1May 30, 2017
System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH13 citations83
US9601303B2Mar 21, 2017
Charged particle beam device and method for inspecting and/or imaging a sample
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH11 citations83
US9472373B1Oct 18, 2016
Beam separator device, charged particle beam device and methods of operating thereof
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH7 citations80
US9666404B2May 30, 2017
Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beam
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH2 citations72
US9589763B1Mar 7, 2017
Method for detecting signal charged particles in a charged particle beam device, and charged particle beam device
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH4 citations72
US9595417B2Mar 14, 2017
High resolution charged particle beam device and method of operating the same
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH1 citations51
INTEGRATED CIRCUIT TESTING
5 patentsUS9035249B1May 19, 2015
Multi-beam system for high throughput EBI
INTEGRATED CIRCUIT TESTING83 citations97
US9245709B1Jan 26, 2016
Charged particle beam specimen inspection system and method for operation thereof
INTEGRATED CIRCUIT TESTING7 citations83
US8921804B2Dec 30, 2014
High brightness electron gun with moving condenser lens
INTEGRATED CIRCUIT TESTING6 citations72
US9202666B1Dec 1, 2015
Method for operating a charged particle beam device with adjustable landing energies
INTEGRATED CIRCUIT TESTING2 citations62
US9330884B1May 3, 2016
Dome detection for charged particle beam device
INTEGRATED CIRCUIT TESTING0 citations41
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH
4 patentsUS10699867B2Jun 30, 2020
Simplified particle emitter and method of operating thereof
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH2 citations73
US10504683B2Dec 10, 2019
Device and method for forming a plurality of charged particle beamlets
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH2 citations72
US9984848B2May 29, 2018
Multi-beam lens device, charged particle beam device, and method of operating a multi-beam lens device
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH2 citations72
US10297418B2May 21, 2019
Method of reducing coma and chromatic aberration in a charged particle beam device, and charged particle beam device
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations41
APPLIED MATERIALS ISRAEL LTD
3 patentsUS9922796B1Mar 20, 2018
Method for inspecting a specimen and charged particle multi-beam device
APPLIED MATERIALS ISRAEL LTD55 citations98
US10453645B2Oct 22, 2019
Method for inspecting a specimen and charged particle multi-beam device
APPLIED MATERIALS ISRAEL LTD9 citations84
US12362131B2Jul 15, 2025
Method for inspecting a specimen and charged particle beam device
APPLIED MATERIALS ISRAEL LTD0 citations50
FROSIEN JüRGEN
3 patentsUS8785879B1Jul 22, 2014
Electron beam wafer inspection system and method of operation thereof
FROSIEN JüRGEN21 citations91
US9305740B2Apr 5, 2016
Charged particle beam system and method of operating thereof
FROSIEN JüRGEN5 citations71
US8866102B2Oct 21, 2014
Electron beam device with tilting and dispersion compensation, and method of operating same
FROSIEN JüRGEN2 citations61