Inventor

KOZEKI TAKASHI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “KOZEKI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUI CHEMICALS INC

2 patents

US10585348B2Mar 10, 2020

Pellicle, pellicle production method and exposure method using pellicle

MITSUI CHEMICALS INC2 citations71

US10606169B2Mar 31, 2020

Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle

MITSUI CHEMICALS INC0 citations49

MURAKAMI SHUICHI

2 patents

US8507158B2Aug 13, 2013

Pellicle frame and pellicle containing same

MURAKAMI SHUICHI5 citations71

US8685598B2Apr 1, 2014

Pellicle and mask adhesive therefor

MURAKAMI SHUICHI4 citations69

TANEICHI DAIKI

1 patent

US8945799B2Feb 3, 2015

Pellicle and mask adhesive agent for use in same

TANEICHI DAIKI9 citations76

KOZEKI TAKASHI

1 patent

US8815476B2Aug 26, 2014

Pellicle membrane

KOZEKI TAKASHI1 citations42