Inventor
GURER EMIR
US22 patents
⚠️ This page may combine multiple inventors who share the name “GURER EMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SILICON VALLEY GROUP
9 patentsUS6238735B1May 29, 2001
Method of uniformly coating a substrate
SILICON VALLEY GROUP38 citations95
US5670210ASep 23, 1997
Method of uniformly coating a substrate
SILICON VALLEY GROUP91 citations95
US6327793B1Dec 11, 2001
Method for two dimensional adaptive process control of critical dimensions during spin coating process
SILICON VALLEY GROUP28 citations92
US5954878ASep 21, 1999
Apparatus for uniformly coating a substrate
SILICON VALLEY GROUP31 citations92
US6468586B1Oct 22, 2002
Environment exchange control for material on a wafer surface
SILICON VALLEY GROUP15 citations91
US6254936B1Jul 3, 2001
Environment exchange control for material on a wafer surface
SILICON VALLEY GROUP33 citations91
US6177133B1Jan 23, 2001
Method and apparatus for adaptive process control of critical dimensions during spin coating process
SILICON VALLEY GROUP50 citations91
US6248171B1Jun 19, 2001
Yield and line width performance for liquid polymers and other materials
SILICON VALLEY GROUP20 citations90
US6242364B1Jun 5, 2001
Plasma deposition of spin chucks to reduce contamination of silicon wafers
SILICON VALLEY GROUP11 citations72
ASML HOLDING NV
8 patentsUS6844027B1Jan 18, 2005
Environment exchange control for material on a wafer surface
ASML HOLDING NV13 citations91
US6669779B2Dec 30, 2003
Yield and line width performance for liquid polymers and other materials
ASML HOLDING NV14 citations90
US6780461B2Aug 24, 2004
Environment exchange control for material on a wafer surface
ASML HOLDING NV16 citations83
US7030039B2Apr 18, 2006
Method of uniformly coating a substrate
ASML HOLDING NV11 citations82
US6977098B2Dec 20, 2005
Method of uniformly coating a substrate
ASML HOLDING NV17 citations82
US6955720B2Oct 18, 2005
Plasma deposition of spin chucks to reduce contamination of Silicon wafers
ASML HOLDING NV2 citations61
US7255975B2Aug 14, 2007
Yield and line width performance for liquid polymers and other materials
ASML HOLDING NV3 citations60
US7625692B2Dec 1, 2009
Yield and line width performance for liquid polymers and other materials
ASML HOLDING NV0 citations50