Inventor

SAVAGE RICHARD

US5 patents

⚠️ This page may combine multiple inventors who share the name “SAVAGE RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SILICON VALLEY GROUP

2 patents

US6177133B1Jan 23, 2001

Method and apparatus for adaptive process control of critical dimensions during spin coating process

SILICON VALLEY GROUP50 citations91

US6242364B1Jun 5, 2001

Plasma deposition of spin chucks to reduce contamination of silicon wafers

SILICON VALLEY GROUP11 citations72

(unassigned)

1 patent

US6027760AFeb 22, 2000

Photoresist coating process control with solvent vapor sensor

SAVAGE RICHARD

1 patent

USD260338SAug 25, 1981

Macrame pole

SAVAGE RICHARD13 citations66

ASML HOLDING NV

1 patent

US6955720B2Oct 18, 2005

Plasma deposition of spin chucks to reduce contamination of Silicon wafers

ASML HOLDING NV2 citations61