Inventor

MANN HANS-JÜRGEN

DE5 patents

⚠️ This page may combine multiple inventors who share the name “MANN HANS-JÜRGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

3 patents

US10068325B2Sep 4, 2018

Method for three-dimensionally measuring a 3D aerial image of a lithography mask

ZEISS CARL SMT GMBH10 citations82

US10634886B2Apr 28, 2020

Method for three-dimensionally measuring a 3D aerial image of a lithography mask

ZEISS CARL SMT GMBH1 citations71

US10606048B2Mar 31, 2020

Imaging optical unit for a metrology system for examining a lithography mask

ZEISS CARL SMT GMBH3 citations71

MANN HANS-JÜRGEN

2 patents

US9110225B2Aug 18, 2015

Illumination optics for a metrology system for examining an object using EUV illumination light and metrology system comprising an illumination optics of this type

MANN HANS-JÜRGEN4 citations68

US8854606B2Oct 7, 2014

Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system

MANN HANS-JÜRGEN2 citations59