Inventor
KULKARNI MAYUR GOVIND
IN7 patents
Patents
7 patentsUS12338530B2Jun 24, 2025
Shaped showerhead for edge plasma modulation
APPLIED MATERIALS INC0 citations58
US11929278B2Mar 12, 2024
Low impedance current path for edge non-uniformity tuning
APPLIED MATERIALS INC0 citations58
US11869795B2Jan 9, 2024
Mesa height modulation for thickness correction
APPLIED MATERIALS INC0 citations58
US12562355B2Feb 24, 2026
Isolator for processing chambers
APPLIED MATERIALS INC0 citations56
US12040210B2Jul 16, 2024
Multi-pressure bipolar electrostatic chucking
APPLIED MATERIALS INC0 citations56
US12119209B2Oct 15, 2024
Dynamic processing chamber baffle
APPLIED MATERIALS INC0 citations52
US12020907B2Jun 25, 2024
Faceplate with localized flow control
APPLIED MATERIALS INC0 citations41