Inventor
ZOU XIAOQUN
US5 patents
Patents
5 patentsUS12189380B2Jan 7, 2025
Diagnostic tool to tool matching and comparative drill-down analysis methods for manufacturing equipment
APPLIED MATERIALS INC2 citations68
US12423639B2Sep 23, 2025
Diagnostic tool to tool matching methods for manufacturing equipment
APPLIED MATERIALS INC0 citations56
US11961030B2Apr 16, 2024
Diagnostic tool to tool matching methods for manufacturing equipment
APPLIED MATERIALS INC0 citations56
US12147212B2Nov 19, 2024
Diagnostic methods for substrate manufacturing chambers using physics-based models
APPLIED MATERIALS INC0 citations55
US12298748B2May 13, 2025
Diagnostic tool to tool matching and full-trace drill-down analysis methods for manufacturing equipment
APPLIED MATERIALS INC0 citations45