Inventor
MATSUI HIRONOBU
KR7 patents
⚠️ This page may combine multiple inventors who share the name “MATSUI HIRONOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS5442183AAug 15, 1995
Charged particle beam apparatus including means for maintaining a vacuum seal
HITACHI LTD47 citations95
US5187371AFeb 16, 1993
Charged particle beam apparatus
HITACHI LTD55 citations95
US5254856AOct 19, 1993
Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems
HITACHI LTD43 citations92
US5229607AJul 20, 1993
Combination apparatus having a scanning electron microscope therein
HITACHI LTD47 citations92