Inventor
SHIMOMOTO HIROSHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SHIMOMOTO HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
9 patentsUS6358125B2Mar 19, 2002
Polishing liquid supply apparatus
EBARA CORP39 citations89
US6508695B2Jan 21, 2003
Pure water reusing system
EBARA CORP12 citations72
US10688622B2Jun 23, 2020
Substrate processing apparatus
EBARA CORP2 citations71
US10096492B2Oct 9, 2018
Substrate cleaning apparatus and polishing apparatus
EBARA CORP2 citations71
US10573509B2Feb 25, 2020
Cleaning apparatus and substrate processing apparatus
EBARA CORP1 citations61
US9842732B2Dec 12, 2017
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations51
US9704728B2Jul 11, 2017
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations51
US11495475B2Nov 8, 2022
Method of cleaning a substrate
EBARA CORP0 citations50
US11541502B2Jan 3, 2023
Substrate processing apparatus
EBARA CORP0 citations46