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Inventor
HATFIELD JOHN P
US
2 patents
Patents
2 patents
US6855476B2
Feb 15, 2005
Photoacid generators for use in photoresist compositions
ARCH SPEC CHEM INC
58 citations
92
US6911297B2
Jun 28, 2005
Photoresist compositions
ARCH SPEC CHEM INC
7 citations
64