Inventor
KETELAARS WILHELMUS SEBASTIANUS MARCUS MARIA
NL7 patents
⚠️ This page may combine multiple inventors who share the name “KETELAARS WILHELMUS SEBASTIANUS MARCUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS9235125B2Jan 12, 2016
Methods of providing patterned chemical epitaxy templates for self-assemblable block copolymers for use in device lithography
ASML NETHERLANDS BV4 citations70
US10240250B2Mar 26, 2019
Method to provide a patterned orientation template for a self-assemblable polymer
ASML NETHERLANDS BV1 citations58
US8830446B2Sep 9, 2014
Exposure apparatus
ASML NETHERLANDS BV0 citations50