Inventor
LEE CHANG YUN
KR6 patents
⚠️ This page may combine multiple inventors who share the name “LEE CHANG YUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS10196738B2Feb 5, 2019
Deposition process monitoring system, and method of controlling deposition process and method of fabricating semiconductor device using the system
SAMSUNG ELECTRONICS CO LTD11 citations82
US10541182B2Jan 21, 2020
Method of inspecting semiconductor substrate and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations65
US9362091B2Jun 7, 2016
Substrate treating apparatus and blocker plate assembly
SAMSUNG ELECTRONICS CO LTD0 citations40