Inventor
SUNG JEONG HYOUN
KR6 patents
⚠️ This page may combine multiple inventors who share the name “SUNG JEONG HYOUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS9812372B2Nov 7, 2017
Electrostatic chuck assembly, semiconductor manufacturing apparatus having the same, and method of measuring temperature of electrostatic chuck
SAMSUNG ELECTRONICS CO LTD319 citations94
US8981694B2Mar 17, 2015
Sensorless control apparatuses of motors and control methods thereof
SAMSUNG ELECTRONICS CO LTD7 citations81
US9306488B2Apr 5, 2016
Dual inverter system and method of controlling the same
SAMSUNG ELECTRONICS CO LTD3 citations68
SUNG JEONG HYOUN
3 patentsUS8599358B2Dec 3, 2013
Maskless exposure apparatuses and frame data processing methods thereof
SUNG JEONG HYOUN2 citations57
US8670107B2Mar 11, 2014
Maskless exposure apparatus and control method thereof
SUNG JEONG HYOUN0 citations46
US8619233B2Dec 31, 2013
Maskless exposure apparatus and pattern compensation method using the same
SUNG JEONG HYOUN1 citations46