Inventor
BAE DO-IN
KR10 patents
⚠️ This page may combine multiple inventors who share the name “BAE DO-IN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS7578944B2Aug 25, 2009
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD23 citations91
US7193369B2Mar 20, 2007
Method for generating gas plasma
SAMSUNG ELECTRONICS CO LTD30 citations91
US7491292B2Feb 17, 2009
Apparatus for catching byproducts in semiconductor device fabrication equipment
SAMSUNG ELECTRONICS CO LTD8 citations82
US7813542B2Oct 12, 2010
Wafer aligning apparatus and related method
SAMSUNG ELECTRONICS CO LTD8 citations80
US7812320B2Oct 12, 2010
Ion source element, ion implanter having the same and method of modifying the same
SAMSUNG ELECTRONICS CO LTD7 citations65
US6787739B2Sep 7, 2004
Apparatus for processing a substrate including a heating apparatus
SAMSUNG ELECTRONICS CO LTD4 citations60
US6833621B2Dec 21, 2004
Metal gasket for a semiconductor fabrication chamber
SAMSUNG ELECTRONICS CO LTD0 citations45