Inventor
CHEN XIAO-MENG
TW4 patents
Patents
4 patentsUS9040385B2May 26, 2015
Mechanisms for cleaning substrate surface for hybrid bonding
TAIWAN SEMICONDUCTOR MFG CO LTD24 citations92
US9159723B2Oct 13, 2015
Method for manufacturing semiconductor device and semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD22 citations91
US10727097B2Jul 28, 2020
Mechanisms for cleaning substrate surface for hybrid bonding
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9431221B2Aug 30, 2016
Plasma-processing apparatus with upper electrode plate and method for performing plasma treatment process
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71