Inventor

BARTLETT GREGORY M

US5 patents

⚠️ This page may combine multiple inventors who share the name “BARTLETT GREGORY M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INC

2 patents

US7648579B2Jan 19, 2010

Substrate support system for reduced autodoping and backside deposition

ASM INC42 citations89

US8834955B2Sep 16, 2014

Methods and apparatus for a gas panel with constant gas flow

ASM INC3 citations61

SARIN MICHAEL CHRISTOPHER

1 patent

US9169975B2Oct 27, 2015

Systems and methods for mass flow controller verification

SARIN MICHAEL CHRISTOPHER506 citations92

GOODMAN MATT G

1 patent

US8088225B2Jan 3, 2012

Substrate support system for reduced autodoping and backside deposition

GOODMAN MATT G17 citations86

BAUER MATTHIAS

1 patent

US8728239B2May 20, 2014

Methods and apparatus for a gas panel with constant gas flow

BAUER MATTHIAS16 citations82