Inventor

SAKUMA HARUNOBU

JP6 patents

⚠️ This page may combine multiple inventors who share the name “SAKUMA HARUNOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

4 patents

US6875280B2Apr 5, 2005

Substrate processing apparatus and substrate processing method

HITACHI INT ELECTRIC INC199 citations97

US9190299B2Nov 17, 2015

Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium

HITACHI INT ELECTRIC INC7 citations83

US9587313B2Mar 7, 2017

Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC3 citations72

US7943528B2May 17, 2011

Substrate processing apparatus and semiconductor devices manufacturing method

HITACHI INT ELECTRIC INC2 citations60

KOKUSAI ELECTRIC CO LTD

1 patent

US5795452AAug 18, 1998

Dry process system

KOKUSAI ELECTRIC CO LTD95 citations95

YANAGISAWA YOSHIHIKO

1 patent

US8222161B2Jul 17, 2012

Substrate processing apparatus and semiconductor devices manufacturing method

YANAGISAWA YOSHIHIKO0 citations47