Inventor

NAKARAI HIROAKI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “NAKARAI HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GIGAPHOTON INC

3 patents

US11778721B2Oct 3, 2023

Extreme ultraviolet light generation system and electronic device manufacturing method

GIGAPHOTON INC0 citations60

US9894743B2Feb 13, 2018

Extreme ultraviolet light generation apparatus

GIGAPHOTON INC0 citations51

US9373926B2Jun 21, 2016

Laser chamber and discharge excitation gas laser apparatus

GIGAPHOTON INC1 citations50

WATANABE YUKIO

1 patent

US9301379B2Mar 29, 2016

Extreme ultraviolet light generation apparatus

WATANABE YUKIO3 citations70

NAKARAI HIROAKI

1 patent

US8885680B2Nov 11, 2014

Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam

NAKARAI HIROAKI4 citations65