Inventor
HELLIG KAY
DE13 patents
⚠️ This page may combine multiple inventors who share the name “HELLIG KAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
12 patentsUS6893967B1May 17, 2005
L-shaped spacer incorporating or patterned using amorphous carbon or CVD organic materials
ADVANCED MICRO DEVICES INC246 citations98
US6696334B1Feb 24, 2004
Method for formation of a differential offset spacer
ADVANCED MICRO DEVICES INC55 citations96
US6673635B1Jan 6, 2004
Method for alignment mark formation for a shallow trench isolation process
ADVANCED MICRO DEVICES INC55 citations96
US6979651B1Dec 27, 2005
Method for forming alignment features and back-side contacts with fewer lithography and etch steps
ADVANCED MICRO DEVICES INC19 citations92
US6881616B1Apr 19, 2005
System for forming a semiconductor device and method thereof including implanting through a L shaped spacer to form source and drain regions
ADVANCED MICRO DEVICES INC24 citations91
US7151055B2Dec 19, 2006
Technique for forming a gate electrode by using a hard mask
ADVANCED MICRO DEVICES INC13 citations83
US6828240B2Dec 7, 2004
Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuits
ADVANCED MICRO DEVICES INC13 citations83
US6699641B1Mar 2, 2004
Photosensitive bottom anti-reflective coating
ADVANCED MICRO DEVICES INC16 citations83
US7256113B1Aug 14, 2007
System for forming a semiconductor device and method thereof
ADVANCED MICRO DEVICES INC19 citations82
US7130762B2Oct 31, 2006
Method and system for handling substrates in a production line including a cluster tool and a metrology tool
ADVANCED MICRO DEVICES INC14 citations76
US6703297B1Mar 9, 2004
Method of removing inorganic gate antireflective coating after spacer formation
ADVANCED MICRO DEVICES INC9 citations73
US6902870B1Jun 7, 2005
Patterning of dielectric with added layers of materials aside from photoresist for enhanced pattern transfer
ADVANCED MICRO DEVICES INC5 citations59