Inventor
LEE SEONKYUNG
US10 patents
⚠️ This page may combine multiple inventors who share the name “LEE SEONKYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS9627186B2Apr 18, 2017
System, method and apparatus for using optical data to monitor RF generator operations
LAM RES CORP14 citations83
US10325760B2Jun 18, 2019
System, method and apparatus for using optical data to monitor RF generator operations
LAM RES CORP2 citations72
US9735069B2Aug 15, 2017
Method and apparatus for determining process rate
LAM RES CORP5 citations72
US11056322B2Jul 6, 2021
Method and apparatus for determining process rate
LAM RES CORP0 citations62
US12360510B2Jul 15, 2025
Large spot spectral sensing to control spatial setpoints
LAM RES CORP0 citations61
US9752981B2Sep 5, 2017
Apparatus with a spectral reflectometer for processing substrates
LAM RES CORP1 citations47