Inventor
ASULIN ITAY
IL4 patents
Patents
4 patentsUS11189451B2Nov 30, 2021
Charged particle beam source and a method for assembling a charged particle beam source
APPLIED MATERIALS ISRAEL LTD0 citations58
US10886092B2Jan 5, 2021
Charged particle beam source and a method for assembling a charged particle beam source
APPLIED MATERIALS ISRAEL LTD0 citations58
US11646173B2May 9, 2023
Scanning electron microscope and a method for overlay monitoring
APPLIED MATERIALS ISRAEL LTD0 citations50
US11835769B2Dec 5, 2023
Adjustable attenuation optical unit
APPLIED MATERIALS ISRAEL LTD0 citations49