Inventor
DRIESSEN THEODORUS WILHELMUS
US8 patents
Patents
8 patentsUS12232244B2Feb 18, 2025
Target supply control apparatus and method in an extreme ultraviolet light source
ASML NETHERLANDS BV2 citations70
US10904994B2Jan 26, 2021
Supply system for an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations60
US10481498B2Nov 19, 2019
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus
ASML NETHERLANDS BV1 citations57
US12139436B2Nov 12, 2024
Droplet generator nozzle
ASML NETHERLANDS BV0 citations54
US10499485B2Dec 3, 2019
Supply system for an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations50
US12295088B2May 6, 2025
Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systems
ASML NETHERLANDS BV0 citations49
US12352371B2Jul 8, 2025
Fluid control device and method for fluid control in an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations45
US12222050B2Feb 11, 2025
Robust fluid coupling apparatus
ASML NETHERLANDS BV0 citations43